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projektai-lsd Lithuanian Standards Board
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prEN ISO 23131-3

Ellipsometry - Part 3: Transparent single layer model (ISO 23131-3:2026)

Draft Public enquiry
Comment end date 2027-01-02
Export comments Read draft and comment

Project stage codes

1. Decision on WI Proposal
2. Projektas
3. Viešoji apklausa
From 2026-11-03 till 2027-01-02
4. Closure of enquiry
5. Submission to Formal Vote

Organisation

CEN Europos standartizacijos komitetas

ICS

17.020 - Metrology and measurement in general

ForeignTC'S

CEN/TC 262

Number of comments

0

Comment start date

2026-11-03

Scope

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.