prEN IEC 63567-1:2025
Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 1: Transmittance evaluation method of EUV pellicle
Draft Public enquiryProject stage codes
1. Decision on WI Proposal
2. Viešoji apklausa
From 2025-12-27
till 2026-02-25
Organisation
CENELEC Europos elektrotechnikos standartizacijos komitetasICS
31.080.99 - Other semiconductor devicesForeignTC'S
CLC/TC 47XNumber of comments
0Comment start date
2025-12-27